Mattson Technology Extends RTP Leadership with Selection of MILLIOS™ for Advanced SUB-2X Nanometer Device Development

FREMONT, Calif. — July 6, 2011 — Mattson Technology, Inc. (NASDAQ: MTSN), a leading supplier of advanced process equipment used to manufacture semiconductors, today announced that a major semiconductor manufacturer has selected its Millios™ millisecond anneal system for advanced logic devices at the sub-2X nanometer (nm) technology nodes. The order followed a head-to-head competitive evaluation where the Millios demonstrated unique technological advantages that enable chipmakers to maximize integrated circuit performance on advanced devices. The system has already been delivered to the customer.

The Millios offers millisecond anneal processing time from 0.5 to 10.0 milliseconds, the widest operating space of any millisecond anneal system on the market. This continuously variable process duration, which is applied across the entire wafer surface, enables advanced sub-20 nm processes while setting the industry’s benchmark for productivity. The Millios is the only tool in the market that offers direct wafer temperature measurement during the entire millisecond anneal. Mattson Technology’s proprietary temperature measurement system ensures process repeatability, which provides increased production reliability.

“Our strategic R&D investments have resulted in a millisecond anneal system that delivers technologically superior processing results and a compelling value proposition,” commented Andreas Toennis, senior vice president and general manager of the Thermal Products Group at Mattson Technology. “This latest selection by yet another major semiconductor manufacturer extends Mattson Technology’s RTP position further into the logic/foundry markets, and we believe Millios’ success will continue to drive our expanding share of the advanced RTP market over the next several years. We look forward to working with our customer to address critical transistor scaling challenges with our unique millisecond anneal system to fabricate next-generation device designs for sub-2X logic processes.”

Contact Information

Mattson Technology

tele: +1-510-657-5900/1-800-MATTSON

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