SPTS Technologies Showcases Latest Release Etch Solutions at Transducers 2015; 21-26 June, Anchorage, Alaska



SPTS will be exhibiting at Transducers 2015, Booth No. 40, next week in Anchorage, Alaska. If you are attending the conference, we invite you to stop by our booth to learn more about the latest in manufacturing technologies for MEMS and other types of sensor devices.

We will be showcasing the Xactix e2 xenon difluoride (XeF2) etcher, the latest addition to our industry-leading range of Release Etch solutions. Building on the success of its predecessor the e1, the new e2 supports enhanced types of recipes which can increase the selectivity of Si over SiN and SiO2 by as much as 10X but in a smaller total footprint, while retaining its low price, table top design and ease of installation and use.

The e2 is just the latest in our line of release etchers using XeF2 and Vapor HF, which provide increased selectivity and stiction and corrosion-free release etching of Si, Ge, Mo and SiO2 sacrificial layers.

If you are attending the conference we look forward to welcoming you to our Booth No. 40 to discuss SPTS’s broad range of release etch, plasma etch, PVD and CVD solutions. If you would like to arrange an appointment with one of our technical experts, please email enquiries@spts.com.

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